【2015年11月18-20日培訓(xùn)】MEMS技術(shù)：面向21世紀(jì)的關(guān)鍵技術(shù)

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MEMS培訓(xùn)課程

MEMS技術(shù)：面向21世紀(jì)的關(guān)鍵技術(shù)--新興趨勢和經(jīng)濟(jì)機(jī)會(huì)

MEMS Technology: A Key Technology for the 21st Century

-Emerging Trends and Economic Opportunities

地點(diǎn)：中國上海

時(shí)間：2015年11月18-20日

為何參加：

MEMS (Micro-electro-mechanical systems) are undoubtedly an enabling key technology for the 21st century, as they can contribute to solutions for practically all grand societal challenges humanity is facing, such as sustainable growth, mobility, environmental problems, health and renewable energy. This fascinating and multidisciplinary research field will certainly strongly grow over the next years, and already represents an important economic factor. MEMS based technology currently has an estimated worldwide revenue of 15-20 billion USD and a forecast of 15-20% annual growth for the foreseeable future.

The short course will cover the main fabrication and design principles of a wide range of MEMS devices, using plenty of practical examples from industry for illustration. A detailed economic breakdown of various MEMS devices and their applications will be given. For fabrication, the main foundry processes will be explained, and for the design the industry standard CAD tools for MEMS devices will be described. The devices covered in the course include pressure sensors, accelerometers, gyroscopes, resonant sensors, energy harvesters, biosensors, actuators and microphones. There will be a special emphasis on emerging application driven MEMS markets such as biomedical sensors, Internet of Things and Industry 4.0. After attending the short course, the participants will have a sound knowledge in MEMS design and fabrication, well prepared to enter the commercial opportunities this field currently is offering.

誰應(yīng)該參加：

Engineers from companies planning to enter or recently have entered the MEMS field. Postgraduate university students planning to work on MEMS for their PhD or Master project.

培訓(xùn)課程介紹：

第一天（2015年11月18日）

第一課：什么是MEMS？
- MEMS從而何來？
- MEMS、微系統(tǒng)技術(shù)和納米技術(shù)的定義
- 比例定律
- 一些真實(shí)世界的例子

Lecture 1: What is MEMS?
- Where did MEMS come from?
- Definitions of MEMS, Microsystem technology and Nanotechnology
- Scaling laws
- Some real world examples

第二課：MEMS經(jīng)濟(jì)地位和預(yù)測
- 當(dāng)前MEMS市場和經(jīng)濟(jì)地位
- 多種MEMS器件應(yīng)用及市場數(shù)據(jù)
- MEMS新興應(yīng)用：消費(fèi)電子、物聯(lián)網(wǎng)、工業(yè)4.0和高端市場
- 主要MEMS廠商和產(chǎn)品路線圖
- 討論環(huán)節(jié)

Lecture 2: Economic Status and Predictions
- Current Market and their economic status
- Market data for various MEMS devices and their applications
- Emerging applications in consumer electronics, Internet of Things, Industry 4.0 and high value markets
- Main MEMS players and product roadmap
- Discussion Session

第三課：MEMS制造原理
- 表面硅和體硅加工技術(shù)
- 標(biāo)準(zhǔn)MEMS制造工藝
- 經(jīng)濟(jì)性：完全集成 vs. 混合MEMS
- MEMS CMOS集成
- 主要MEMS代工服務(wù)和工藝說明
- 討論環(huán)節(jié)

Lecture 3: Fabrication Principles for MEMS
- Surface and bulk micromachining
- Standard MEMS fabrication processes
- Economics of fully integrated vs. hybrid MEMS
- MEMS CMOS integration
- Description of main MEMS foundry services and processes
- Discussion Session

第二天（2015年11月19日）

第一課：MEMS物理傳感器設(shè)計(jì)原理
- 主要MEMS傳感器原理
- 主要MEMS執(zhí)行器原理
- MEMS CAD和仿真工具
- 實(shí)踐案例

Lecture 1: Design Principles for MEMS Physical Sensors
- Main transduction principles used in MEMS
- Main actuation principles used in MEMS
- CAD and simulation tools for MEMS
- Practical examples

第二課：MEMS壓力傳感器及其應(yīng)用
- 工作原理
- 汽車級(jí)壓力傳感器
- 消費(fèi)類壓力傳感器
- 醫(yī)療級(jí)壓力傳感器（活性植入物）
- 討論環(huán)節(jié)

Lecture 2: MEMS Pressure Sensors and Their Applications
- Principles of operation
- Pressure sensors for automotive applications
- Pressure Sensors for consumer applications
- Pressure sensors for medical applications (active implants)
- Discussion Session

第三課：MEMS慣性傳感器
- 工作原理
- 加速度計(jì)和陀螺儀
- 消費(fèi)類慣性傳感器
- 高性能慣性傳感器
- 問答環(huán)節(jié)
- 討論環(huán)節(jié)

Lecture 3: MEMS Inertial Sensors
- Principles of operation
- Accelerometers and gyroscopes
- Inertial sensors for consumer applications
- Inertial sensors for high performance applications
- Q&A Session
- Discussion Session

第三天（2015年11月20日）

第一課：生物和醫(yī)療領(lǐng)域的MEMS器件
- 應(yīng)用于生物分析物濃度測定的MEMS諧振傳感器
- 酶傳感器
- 人工視網(wǎng)膜假體
- 芯片實(shí)驗(yàn)室

Lecture 1: MEMS Devices for Biochemical and medical applications
- MEMS resonator sensors for bio-analyte concentration measurement
- Enzymatic sensors
- Artificial retinal prosthesis
- Lab on a chip

第二課：物聯(lián)網(wǎng)和工業(yè)4.0領(lǐng)域中的MEMS技術(shù)
- 能量收集器
- 可穿戴設(shè)備中的MEMS
- 智能制造領(lǐng)域中的MEMS
- 萬億級(jí)傳感器前景
- 問答環(huán)節(jié)

Lecture 2: MEMS for Internet of Things and Industry 4.0
- Energy harvesters
- MEMS for wearable technology
- MEMS for smart production
- The trillion sensor vision
- Q&A Session

第三課：新興MEMS和應(yīng)用
- MEMS麥克風(fēng)和超聲波傳感器
- MEMS執(zhí)行器（自動(dòng)對焦、噴墨打印頭、微揚(yáng)聲器）
- MEMS輻射熱測量計(jì)
- RF MEMS和MEMS振蕩器
- 氣體和濕度傳感器
- 紫外線傳感器
- MEMS顯示器
- 學(xué)術(shù)領(lǐng)域的MEMS研究課題
- 總結(jié)和反饋環(huán)節(jié)

Lecture 3: Emerging MEMS and Applications
- MEMS microphones and ultrasonic sensors
- MEMS actuators (autofocus, inkjet, microspeaker)
- MEMS bolometer
- RF MEMS and oscillator
- Gas and humidity sensors
- UV Sensors
- MEMS display
- Academic MEMS research topics
- Round-up and Feedback Session

老師簡介：

MEMS技術(shù)培訓(xùn)老師：Michael Kraft

Michael Kraft is a Professor of Micro- and Nanosystems at the University of Liege, Department of Electrical Engineering and Computer Science (Montefiore Institute). From 2012-2014, he was at the Fraunhofer Institute for Microelectronic Circuits and Systems in Duisburg, Germany, where he headed the Department of Micro- and Nanosystems focussing on fully integrated microsensors and biohybrid systems. He concurrently held the W3 Professorial Chair of Integrated Micro- and Nanosystems at the University of Duisburg-Essen.

From 1999 to 2012 he was a faculty member and Professor of Micro-System-Technology at the University of Southampton, UK. Concurrently, he also was the director of the Southampton Nanofabrication Centre. He graduated with a Dipl.-Ing. (Univ.) in electrical and electronics engineering at the Friedrich Alexander Universität Erlangen-Nürnberg in 1993. In 1997 he was awarded a PhD from Coventry University on the development of a MEMS accelerometer. He then spent two years at the Berkeley Sensors and Actuator Centre at the University of California working on integrated MEMS gyroscopes. He has 20 years of experience in micro- and nano-fabrication techniques, microsensors and actuators and their interface circuits, in particular for capacitive sensors. He has a broad interest in MEMS and nanotechnology ranging from process development to system integration of MEMS and nano-devices. In 2005 his research group developed the world’s first fifth order sigma-delta-modulator (SDM) interface for a MEMS accelerometer, and in 2007 a band-pass SDM for a MEMS gyroscope. He has done ground-breaking work on electrostatically levitated micro-objects for sensing and actuation applications, and developed several novel, micro-fabricated atom and ion chips. He has published over 200 peer reviewed journal and conference publications as an author or co-author. He also contributed to three text books on MEMS, and edited a book on MEMS for aerospace and automotive applications. He currently serves on several steering and technical committees of international conferences such as IEEE Sensors, Eurosensors and MME, as well as being an associate editor for the journals Mechanical Sciences and Sensors and Sensors Systems. He also has done industrial consultancy for many companies active in the MEMS field.

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