Day 1--18th Nov. 2015（第一天，2015年11月18號）
Lecture 1: What is MEMS?第一課：什么是MEMS？
- Where did MEMS come from?-MEMS從而何來？- Definitions of MEMS, Microsystemtechnology and Nanotechnology-MEMS、微系統技術和納米技術的定義- Scaling laws-比例定律- Some real world examples-一些真實世界的例子
Lecture 2: Economic Status and Predictions第二課：MEMS經濟地位和預測
- Current Market and their economic status-當前MEMS市場和經濟地位- Market data for various MEMS devices and their applications-多種MEMS器件應用及市場數據- Emerging applications in consumer electronics, Internet of Things, Industry 4.0 and high value markets-MEMS新興應用：消費電子、物聯網、工業4.0和高端市場- Main MEMS players and product roadmap-主要MEMS廠商和產品路線圖- Discussion Session-討論環節
Lecture 3: Fabrication Principles for MEMS第三課：MEMS制造原理
- Surface and bulk micromachining- 表面硅和體硅加工技術- Standard MEMS fabrication processes-標準MEMS制造工藝- Economics of fully integrated vs hybrid MEMS-經濟性：完全集成 vs. 混合MEMS- MEMS CMOS integration、- MEMS CMOS集成- Description of main MEMS foundry services and processes-主要MEMS代工服務和工藝說明- Discussion Session-討論環節
Day 2--19th Nov. 2015（第二天，2015年11月19號）
Lecture 1: Design Principles for MEMS Physical Sensors
第一課：MEMS物理傳感器設計原理
- Main transduction principles used in MEMS-主要MEMS傳感器原理- Main actuation principles used in MEMS-主要MEMS執行器原理- CAD and simulation tools for MEMS-MEMS CAD和仿真工具- Practical examples-實踐案例
Lecture 2: MEMS Pressure Sensors and Their Applications第二課：MEMS壓力傳感器及其應用
- Principles of operation-工作原理- Pressure sensors for automotive applications-汽車級壓力傳感器- Pressure Sensors for consumer applications-消費類壓力傳感器- Pressure sensors for medical applications (active implants)-醫療級壓力傳感器（活性植入物）- Discussion Session-討論環節
Lecture 3: MEMS Inertial Sensors第三課：MEMS慣性傳感器
- Principles of operation-工作原理- Accelerometers and gyroscopes-加速度計和陀螺儀- Inertial sensors for consumer applications-消費類慣性傳感器- Inertial sensors for high performance applications-高性能慣性傳感器- Q&A Session-問答環節- Discussion Session-討論環節
Day 3--20th Nov. 2015（第三天，2015年20月號）
Lecture 1: MEMS Devices for Biochemical and medical applications第一課：生物和醫療領域的MEMS器件
- MEMS resonator sensors for bio-analyte concentration measurement-應用于生物分析物濃度測定的MEMS諧振傳感器- Enzymatic sensors-酶傳感器- Artificial retinal prosthesis-人工視網膜假體- Lab on a chip-芯片實驗室
Lecture 2: MEMS for Internet of Things and Industry 4.0第二課：物聯網和工業4.0領域中的MEMS技術
- Energy harvesters-能量收集器- MEMS for wearable technology-可穿戴設備中的MEMS- MEMS for smart production-智能制造領域中的MEMS- The trillion sensor vision-萬億級傳感器前景- Q&A Session-問答環節
Lecture 3: Emerging MEMS and Applications第三課：新興MEMS和應用
- MEMS microphones and ultrasonic sensors-MEMS麥克風和超聲波傳感器- MEMS actuators (autofocus, inkjet, microspeaker)-MEMS執行器（自動對焦、噴墨打印頭、微揚聲器）- MEMS bolometer-MEMS輻射熱測量計- RF MEMS and oscillator-RF MEMS和MEMS振蕩器- Gas and humidity sensors-氣體和濕度傳感器- UV Sensors-紫外線傳感器- MEMS display-MEMS顯示器- Academic MEMS research topics-學術領域的MEMS研究課題- Round-up and Feedback Session-總結和反饋環節
Michael Kraft is a Professor of Micro- and Nanosystems at the University of Liege, Department of Electrical Engineering and Computer Science (Montefiore Institute). From 2012-2014, he was at the Fraunhofer Institute for Microelectronic Circuits and Systems in Duisburg, Germany, where he headed the Department of Micro- and Nanosystems focussing on fully integrated microsensors and biohybrid systems. He concurrently held the W3 Professorial Chair of Integrated Micro- and Nanosystems at the University of Duisburg-Essen.
From 1999 to 2012 he was a faculty member and Professor of Micro-System-Technology at the University of Southampton, UK. Concurrently, he also was the director of the Southampton Nanofabrication Centre. He graduated with a Dipl.-Ing. (Univ.) in electrical and electronics engineering at the Friedrich Alexander Universität Erlangen-Nürnberg in 1993. In 1997 he was awarded a PhD from Coventry University on the development of a MEMS accelerometer. He then spent two years at the Berkeley Sensors and Actuator Centre at the University of California working on integrated MEMS gyroscopes. He has 20 years of experience in micro- and nano-fabrication techniques, microsensors and actuators and their interface circuits, in particular for capacitive sensors. He has a broad interest in MEMS and nanotechnology ranging from process development to system integration of MEMS and nano-devices. In 2005 his research group developed the world’s first fifth order sigma-delta-modulator (SDM) interface for a MEMS accelerometer, and in 2007 a band-pass SDM for a MEMS gyroscope. He has done ground-breaking work on electrostatically levitated micro-objects for sensing and actuation applications, and developed several novel, micro-fabricated atom and ion chips. He has published over 200 peer reviewed journal and conference publications as an author or co-author. He also contributed to three text books on MEMS, and edited a book on MEMS for aerospace and automotive applications. He currently serves on several steering and technical committees of international conferences such as IEEE Sensors, Eurosensors and MME, as well as being an associate editor for the journals Mechanical Sciences and Sensors and Sensors Systems. He also has done industrial consultancy for many companies active in the MEMS field.
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